Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790187 | Post-etch residue removal for advanced node beol processing | Emanuel I. Cooper, Makonnen Payne, WonLae Kim, Eric Hong, Chieh-Ju Wang +1 more | 2020-09-29 |
| 10651045 | Compositions and methods for etching silicon nitride-containing substrates | Emanuel I. Cooper, Steven M. Bilodeau, Wen-Haw Dai, Min-Chieh Yang, Hsing-Chen Wu +2 more | 2020-05-12 |
| 10472567 | Compositions and methods for selectively etching titanium nitride | Li-Min Chen, Emanuel I. Cooper, Steven Lippy, Lingyan Song, Chia-Jung Hsu +1 more | 2019-11-12 |
| 10428271 | Compositions and methods for selectively etching titanium nitride | Emanuel I. Cooper, Li-Min Chen, Steven Lippy, Chia-Jung Hsu, Chieh-Ju Wang | 2019-10-01 |
| 10392560 | Compositions and methods for selectively etching titanium nitride | Jeffrey A. Barnes, Emanuel I. Cooper, Li-Min Chen, Steven Lippy, Rekha Rajaram | 2019-08-27 |
| 10340150 | Ni:NiGe:Ge selective etch formulations and method of using same | Steven M. Bilodeau, Jeffrey A. Barnes, Emanuel I. Cooper, Hsing-Chen Wu, Thomas Parson +1 more | 2019-07-02 |
| 9765288 | Compositions for cleaning III-V semiconductor materials and methods of using same | Emanuel I. Cooper, Hsing-Chen Wu, Min-Chieh Yang, Li-Min Chen | 2017-09-19 |
| 9546321 | Compositions and methods for selectively etching titanium nitride | Jeffrey A. Barnes, Emanuel I. Cooper, Li-Min Chen, Steven Lippy, Rekha Rajaram | 2017-01-17 |