Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9002514 | Wafer position correction with a dual, side-by-side wafer transfer robot | Damon Tyrone Genetti, Shawn M. Hamilton, Rich Blank | 2015-04-07 |
| 8920162 | Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation | Michael Nordin, Chris Gage, Shawn M. Hamilton | 2014-12-30 |
| 8491248 | Loadlock designs and methods for using same | Chris Gage, Shawn M. Hamilton, Keith Wood, Damon Tyrone Genetti | 2013-07-23 |
| 8052419 | Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation | Michael Nordin, Chris Gage, Shawn M. Hamilton | 2011-11-08 |
| 8033769 | Loadlock designs and methods for using same | Chris Gage, Shawn M. Hamilton, Keith Wood, Damon Tyrone Genetti | 2011-10-11 |