SS

Shaun Smith

MI Mks Instruments: 5 patents #66 of 442Top 15%
Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #779,831 of 4,157,543Top 20%
6
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12283462 Control of plasma formation by RF coupling structures Hema Swaroop Mopidevi, Lee Chen, Thomas W. Anderson, Neil Benjamin 2025-04-22
11531312 Adaptive control for a power generator David J. Coumou, Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV 2022-12-20
11042140 Adaptive control for a power generator David J. Coumou, Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV 2021-06-22
10553403 Polygonal toroidal plasma source Paul Meneghini 2020-02-04
10076020 Apparatus and method for plasma ignition with a self-resonating device Steven R. Walther, Chen-An Wu 2018-09-11
9736920 Apparatus and method for plasma ignition with a self-resonating device Steven R. Walther, Chen-An Wu 2017-08-15