SE

Shigeki EGAMI

NI Nikon: 4 patents #874 of 2,493Top 40%
Overall (All Time): #1,091,893 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12397367 Processing system and processing method Yosuke TATSUZAKI 2025-08-26
12383981 Processing apparatus, and manufacturing method of movable body Masayuki Shiraishi, Yoshio Kawabe, Yosuke TATSUZAKI, Yuichi Shibazaki 2025-08-12
12121991 Processing apparatus, and manufacturing method of movable body Masayuki Shiraishi, Yoshio Kawabe, Yosuke TATSUZAKI, Yuichi Shibazaki 2024-10-22
10845720 Mark detection apparatus, mark detection method, measurement apparatus, exposure apparatus, exposure method and device manufacturing method Yoshifumi Nakakoji 2020-11-24