Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403508 | Liquid chemical supply module and substrate processing apparatus including the same | Sangwoo PARK, Youngjoon Han, Seonghyeon Kim, Gi Hun CHOI | 2025-09-02 |
| 11869763 | Apparatus and system for treating substrate | Jun Keon Ahn, Soo Young Park, Ohyeol Kwon, Jung Hwan Lee | 2024-01-09 |
| 11869778 | Liquid supply unit, and apparatus and method for processing substrate | Gi Hun CHOI, Buyoung Jung, Gui Su PARK | 2024-01-09 |
| 11794219 | Liquid supply unit and substrate treating apparatus and method | Buyoung Jung, Seung-Hwan Cho | 2023-10-24 |
| 11232942 | Substrate treating method and substrate treating apparatus | Buyoung Jung, Gui Su PARK, Jae Hong Lee, Ho-Young Kim, Yunsuk Jeung | 2022-01-25 |