Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051623 | Enhanced grating aligned patterning for EUV direct print processes | Shyam Benegal KADALI, Marvin Young Paik, Sheng-Po Fang, Leonard P. GULER, Charles H. Wallace +1 more | 2024-07-30 |