Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255063 | Substrate processing system and substrate processing method | Hayato TANOUE, Takashi Uno, Suguru Enokida | 2025-03-18 |
| 9486989 | Bonding method, bonding apparatus, and bonding system | — | 2016-11-08 |
| 9469093 | Bonding apparatus, bonding system and bonding method | Norio Wada, Goro Furutani | 2016-10-18 |
| 9165803 | Bonding method, bonding apparatus and bonding system | Goro Furutani, Norio Wada | 2015-10-20 |
| 9005385 | Bonding apparatus, bonding system and bonding method | Norio Wada, Goro Furutani | 2015-04-14 |