| 5983704 |
Method of measuring and analyzing contamination particles generated during the manufacture of semiconductor devices |
Sang-Oh Park, Jin-Sung Kim, Hee-se Kang |
1999-11-16 |
| 5880355 |
Apparatus for measuring contamination particles during the manufacture of semiconductor devices |
Sang-Oh Park, Jin-Sung Kim, Hee-se Kang |
1999-03-09 |
| 5871812 |
Apparatus and method for depositing molecular impurities on a semiconductor wafer |
Jung-Sung Hwang, Dong Joo Lee, Nam-hee You |
1999-02-16 |
| 5863411 |
Method for forming a minute pattern in a metal workpiece |
Seung Oun Kang, Doo-Heun Baek, Won-chae Suh |
1999-01-26 |
| 5827396 |
Device for turning a wafer during a wet etching process |
Se-Jong Ko, Pyeong Sik Jeon, Young-hwan Yun |
1998-10-27 |
| 5814822 |
Ion implanter and ion implanting method using the same |
Sang-geun Oh, Jeong-Gon Kim, Do Hyeong Kim |
1998-09-29 |
| 5731592 |
Exhaust system for an ion implanter |
Sang G. Oh, Jueng Gon Kim, Chan Woo Park |
1998-03-24 |
