Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825482 | Ion implantation system for manufacturing semiconductor device | Sang G. Oh, Tae-Hyo Ro | 2004-11-30 |
| 5945682 | Space-saving ion-implantation system installed both in and adjacent to a semiconductor manufacturing line | Sang G. Oh, Tae-Hyo Ro | 1999-08-31 |
| 5731592 | Exhaust system for an ion implanter | Sang G. Oh, Sang-young Moon, Chan Woo Park | 1998-03-24 |