Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6095904 | Orbital motion chemical-mechanical polishing method and apparatus | Joseph R. Breivogel, Michael R. Oliver, Leopoldo D. Yau, Christopher E. Barns | 2000-08-01 |
| 5554064 | Orbital motion chemical-mechanical polishing apparatus and method of fabrication | Joseph R. Breivogel, Michael R. Oliver, Leopoldo D. Yau, Christopher E. Barns | 1996-09-10 |