Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10546756 | Method for generating vertical profiles in organic layer etches | Sriharsha Jayanti, Steven Chuang, Hsu-Cheng Huang, Jian Wu | 2020-01-28 |
| 8912633 | In-situ photoresist strip during plasma etching of active hard mask | Tom Choi, Taejoon Han, Sean S. Kang, Prabhakara Gopaladasu, Bi-Ming Yen | 2014-12-16 |
| 8283255 | In-situ photoresist strip during plasma etching of active hard mask | Tom Choi, Taejoon Han, Sean S. Kang, Prabhakara Gopaladasu, Bi-Ming Yen | 2012-10-09 |
| 7782591 | Methods of and apparatus for reducing amounts of particles on a wafer during wafer de-chucking | Sean S. Kang, Tom Choi, Taejoon Han | 2010-08-24 |