Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12246482 | Control apparatus, imprint apparatus, and method of manufacturing article | Hiroyuki Sekiguchi, Takashi Shibayama, Yuma Onizawa | 2025-03-11 |
| 12147164 | Motion control apparatus, lithography apparatus, planarization apparatus, processing apparatus, and article manufacturing method | Yuichiro Miki, Shota Takami | 2024-11-19 |
| 11815861 | Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control method | Yuichiro Miki | 2023-11-14 |
| 11714352 | Imprinting apparatus, imprinting method, method for producing article, substrate, and mold | — | 2023-08-01 |
| 11584063 | Imprint method, imprint apparatus, and article manufacturing method | — | 2023-02-21 |
| 11498260 | Imprint method and method for manufacturing article | — | 2022-11-15 |
| 10209633 | Vibration control apparatus, lithography apparatus, and method of manufacturing article | Kenji Noda | 2019-02-19 |
| 9671704 | Vibration reduction apparatus, lithography apparatus and method of manufacturing article | — | 2017-06-06 |
| 9665108 | Vibration reduction apparatus, lithography apparatus, and method of manufacturing article | — | 2017-05-30 |
| 9599185 | Vibration control apparatus, lithography apparatus, and article manufacturing method | — | 2017-03-21 |
| 9052614 | Vibration control apparatus, lithography apparatus, and method of manufacturing article | Katsumi Asada | 2015-06-09 |
| 7948695 | Optical element positioning apparatus, projection optical system and exposure apparatus | Makoto Mizuno, Shigeyuki Uzawa | 2011-05-24 |
| 7821726 | Optical element positioning apparatus, projection optical system and exposure apparatus | Makoto Mizuno, Shigeyuki Uzawa | 2010-10-26 |
| 7733462 | Exposure apparatus and exposure method | — | 2010-06-08 |
| 7643150 | Optical apparatus, exposure apparatus, and device manufacturing method | — | 2010-01-05 |
| 7589911 | Technique for positioning optical system element | Hiroshi Ito | 2009-09-15 |
| 7221463 | Positioning apparatus, exposure apparatus, and method for producing device | Makoto Mizuno, Mitsuru Inoue | 2007-05-22 |
| 7133115 | Positioning device, exposure apparatus using the positioning device, and device production method | Hiroshi Ito | 2006-11-07 |