Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147164 | Motion control apparatus, lithography apparatus, planarization apparatus, processing apparatus, and article manufacturing method | Ryo Nawata, Shota Takami | 2024-11-19 |
| 11815861 | Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control method | Ryo Nawata | 2023-11-14 |
| 7336874 | Display element and display device | — | 2008-02-26 |