Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7507678 | Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film, and substrate | Norifumi Fujimura, Hiroya Kitahata, Tsuyoshi Uehara, Takuya Yara | 2009-03-24 |