Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7507678 | Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film, and substrate | Norifumi Fujimura, Ryoma Hayakawa, Hiroya Kitahata, Tsuyoshi Uehara | 2009-03-24 |
| 5968377 | Treatment method in glow-discharge plasma and apparatus thereof | Motokazu Yuasa | 1999-10-19 |