Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7819081 | Plasma film forming system | Shinichi Kawasaki, Sumio Nakatake, Setsuo Nakajima, Yuji Eguchi, Junichiro Anzai +1 more | 2010-10-26 |
| 7507678 | Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film, and substrate | Norifumi Fujimura, Ryoma Hayakawa, Tsuyoshi Uehara, Takuya Yara | 2009-03-24 |