Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7507678 | Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film, and substrate | Ryoma Hayakawa, Hiroya Kitahata, Tsuyoshi Uehara, Takuya Yara | 2009-03-24 |
| 6245451 | Ferroelectric material, method of manufacturing the same, semiconductor memory, and method of manufacturing the same | Akira Kamisawa | 2001-06-12 |