Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6849191 | Method and apparatus for treating surface of semiconductor | Tetsuo Ono, Tatsumi Mizutani, Tokuo Kure, Takafumi Tokunaga, Masayuki Kojima | 2005-02-01 |
| 6767838 | Method and apparatus for treating surface of semiconductor | Tetsuo Ono, Tatsumi Mizutani, Tokuo Kure, Takafumi Tokunaga, Masayuki Kojima | 2004-07-27 |
| 6235146 | Vacuum treatment system and its stage | Masanori Kadotani, Saburo Kanai, Youichi Itou, Takashi Fujii, Hironobu Kawahara +2 more | 2001-05-22 |