Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9739913 | Extreme ultraviolet capping layer and method of manufacturing and lithography thereof | Cara Beasley, Ralf Hofmann, Majeed A. Foad | 2017-08-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9739913 | Extreme ultraviolet capping layer and method of manufacturing and lithography thereof | Cara Beasley, Ralf Hofmann, Majeed A. Foad | 2017-08-22 |