Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6557248 | Method of fabricating an electrostatic chuck | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred Goldspeil +2 more | 2003-05-06 |
| 6023405 | Electrostatic chuck with improved erosion resistance | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred Goldspeil +2 more | 2000-02-08 |
| 5822171 | Electrostatic chuck with improved erosion resistance | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred A. Goldspiel +2 more | 1998-10-13 |