| 6912267 |
Erosion reduction for EUV laser produced plasma target sources |
Rocco A. Orsini, Michael B. Petach, Mark E. Michaelian, Henry Shields, Steven W. Fornaca |
2005-06-28 |
| 6864497 |
Droplet and filament target stabilizer for EUV source nozzles |
Rocco A. Orsini, Michael B. Petach |
2005-03-08 |
| 6835944 |
Low vapor pressure, low debris solid target for EUV production |
Rocco A. Orsini, Michael B. Petach, Mark E. Michaelian, Henry Shields, Steven W. Fornaca |
2004-12-28 |
| 6738452 |
Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source |
Robert A. Bunnell, Michael B. Petach, Rocco A. Orsini |
2004-05-18 |
| 6661018 |
Shroud nozzle for gas jet control in an extreme ultraviolet light source |
Charles W. Clendening, Jr. |
2003-12-09 |
| 6657213 |
High temperature EUV source nozzle |
Rocco A. Orsini, Michael B. Petach |
2003-12-02 |
| 6324256 |
Liquid sprays as the target for a laser-plasma extreme ultraviolet light source |
Michael B. Petach, Rocco A. Orsini |
2001-11-27 |