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Cathode current control system for a wafer electroplating apparatus |
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Cathode current control system for a wafer electroplating apparatus |
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Apparatus for rotary cathode electroplating with wireless power transfer |
Joseph J. Fatula, Jr., Richard J. Contreras, Guillermo Prada-Silva, Andrew Chiu, Rainer Schieferstein |
2002-12-31 |
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Apparatus for wireless transfer of power to a rotating element |
Joseph J. Fatula, Jr., Richard J. Contreras, Guillermo Prada-Silva, Andrew Chiu, Rainer Schieferstein |
2002-08-20 |
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Cathode current control system for a wafer electroplating apparatus |
Robert W. Berner, Joseph J. Fatula, Jr., Richard J. Contreras, Andrew Chiu |
2001-11-27 |
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Rotary element apparatus with wireless power transfer |
Joseph J. Fatula, Jr., Richard J. Contreras, Guillermo Prada-Silva, Andrew Chiu, Rainer Schieferstein |
2001-08-21 |
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Multi-compartment eletroplating system |
Panayotis Andricacos, Moritz Branger, Robert M. Browne, John O. Dukovic, Benjamin W. B. Fu +4 more |
1994-05-17 |
