| 7748542 |
Batch deposition tool and compressed boat |
Joseph Yudovsky, Nir Merry |
2010-07-06 |
| 7381926 |
Removable heater |
Joseph Yudovsky |
2008-06-03 |
| 6780464 |
Thermal gradient enhanced CVD deposition at low pressure |
Daniel L. Brors |
2004-08-24 |
| 6506691 |
High rate silicon nitride deposition method at low pressures |
Daniel L. Brors |
2003-01-14 |
| 6352593 |
Mini-batch process chamber |
Daniel L. Brors |
2002-03-05 |
| 6352594 |
Method and apparatus for improved chemical vapor deposition processes using tunable temperature controlled gas injectors |
Daniel L. Brors |
2002-03-05 |
| 6321680 |
Vertical plasma enhanced process apparatus and method |
Daniel L. Brors |
2001-11-27 |
| 6287635 |
High rate silicon deposition method at low pressures |
Daniel L. Brors |
2001-09-11 |
| 6235652 |
High rate silicon dioxide deposition at low pressures |
Daniel L. Brors |
2001-05-22 |
| 6167837 |
Apparatus and method for plasma enhanced chemical vapor deposition (PECVD) in a single wafer reactor |
— |
2001-01-02 |
| RE36957 |
Method and apparatus for cold wall chemical vapor deposition |
Daniel L. Brors |
2000-11-21 |
| 5668533 |
High security balanced-type, magnetically-actuated proximity switch system |
John T. Jackson, Jr., Robert C. Hunt |
1997-09-16 |
| 5551985 |
Method and apparatus for cold wall chemical vapor deposition |
Daniel L. Brors |
1996-09-03 |
| 4871204 |
Touch bar release locking system |
Mark R. Barton |
1989-10-03 |
| 4682801 |
Electromagnet access control circuit |
Sasson Toeg |
1987-07-28 |
| 4516114 |
Magnetic locking status detection system |
— |
1985-05-07 |
| 4262591 |
Office label printer and dispenser |
— |
1981-04-21 |
