Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6183612 | Sputtering cathode | Jorg Krempel-Hesse, Martin Bahr | 2001-02-06 |
| 6139706 | Sputter cathode | Jorg Krempel-Hesse, Martin Bahr | 2000-10-31 |
| 6077407 | Sputtering cathode based on the magnetron principle | Michael Liehr, Jorg Krempel-Hesse | 2000-06-20 |
| 5108571 | Process for coating a dielectric substrate with copper | Rainer Ludwig, Anton Dietrich, Reiner Kukla | 1992-04-28 |
| 4885070 | Method and apparatus for the application of materials | Gregor A. Campbell, Robert W. Conn, Dan M. Goebel, Hans Aichert, Hans-Georg Betz +7 more | 1989-12-05 |
| 4428809 | Method and apparatus for forming electrically conductive transparent oxide | Klaus-Jurgen Heimbach, Wolf-Dieter Munz, Heinz Wenzl | 1984-01-31 |