Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935736 | Substrate processing method and substrate processing apparatus | Tsunemoto Ogata, Mitsunori Nakamori | 2024-03-19 |
| 11450530 | Substrate processing apparatus and substrate processing method | — | 2022-09-20 |
| 11049723 | Substrate processing method and substrate processing apparatus | Koukichi Hiroshiro, Koji Kagawa, Kenji Sekiguchi | 2021-06-29 |