Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6854473 | Method and apparatus for executing plural processes on a microelectronic workpiece at a single processing station | Kyle M. Hanson | 2005-02-15 |
| 6602383 | Apparatus and methods for controlling workpiece surface exposure to processing liquids during the fabrication of microelectronic components | Robert W. Batz, Jr., Steven Edward Kelly, James Doolittle | 2003-08-05 |
| 6090711 | Methods for controlling semiconductor workpiece surface exposure to processing liquids | Robert W. Batz, Jr., Steven Edward Kelly | 2000-07-18 |