Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11934092 | Method of annealing reflective photomask by using laser | Hakseung Han, Sanguk Park, Jongju Park | 2024-03-19 |
| 11852583 | Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method | Jongju Park, Hakseung Han, Seongsue Kim | 2023-12-26 |
| 11635371 | Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method | Jongju Park, Hakseung Han, Seongsue Kim | 2023-04-25 |
| 11506968 | Method of annealing reflective photomask by using laser | Hakseung Han, Sanguk Park, Jongju Park | 2022-11-22 |