Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7119016 | Deposition of carbon and nitrogen doped poly silicon films, and retarded boron diffusion and improved poly depletion | Ashima B. Chakravarti, Anita Madan, Woo-Hyeong Lee, Gregory DiBello | 2006-10-10 |
| 6713127 | Methods for silicon oxide and oxynitride deposition using single wafer low pressure CVD | Janardhanan Anand Subramony, Yoshitaka Yokota, Lee Luo, Aihua Chen | 2004-03-30 |