Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5447570 | Purge gas in wafer coating area selection | Johannes Schmitz, Frederick J. Scholz, Norman L. Turner, Frank O. Uher, Sien G. Kang +1 more | 1995-09-05 |
| 5387289 | Film uniformity by selective pressure gradient control | Johannes Schmitz, Sien G. Kang, Edward J. Rode, Frank O. Uher | 1995-02-07 |