Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811158 | Multi-mirror laser sustained plasma light source | Mark Wang | 2020-10-20 |
| 9625726 | Lens array-based illumination for wafer inspection | — | 2017-04-18 |
| 9128064 | Super resolution inspection system | Daniel L. Cavan, Grace Hsiu-Ling Chen | 2015-09-08 |
| 7705331 | Methods and systems for providing illumination of a specimen for a process performed on the specimen | Greg Kirk, Rich Solarz, Chris Kirk, Gil Delgado, Anatoly Schemelinin +2 more | 2010-04-27 |
| 7654715 | System and method for illuminating a specimen with uniform angular and spatial distribution | Charles N. Wang | 2010-02-02 |