Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422095 | Scatterometry modeling in the presence of undesired diffraction orders | Liequan Lee, Shankar Krishnan, David C. S. Wu, Emily Chiu | 2022-08-23 |
| 11156548 | Measurement methodology of advanced nanostructures | Manh Dang Nguyen, Alexander Kuznetsov, Liequan Lee, Natalia Malkova, Paul Aoyagi +3 more | 2021-10-26 |
| 10732515 | Detection and measurement of dimensions of asymmetric structures | Qi Dai, Liequan Lee | 2020-08-04 |