| 8906456 |
Apparatus and method for high-throughput chemical vapor deposition |
Piotr Strzyzewski, Marcus Schumacher, Johannes Lindner, Antonio Mesquida Küsters |
2014-12-09 |
| 8349081 |
Gas distributor with pre-chambers arranged in planes |
Markus Reinhold, Gerhard Karl Strauch |
2013-01-08 |
| 8298337 |
Gas inlet element for a CVD reactor |
Markus Reinhold, Gerhard Karl Strauch |
2012-10-30 |
| 8114480 |
Method for self-limiting deposition of one or more monolayers |
Johannes Lindner |
2012-02-14 |
| 7732308 |
Process for depositing layers containing silicon and germanium |
Marcus Schumacher, Johannes Lindner, Timothy McEntee |
2010-06-08 |
| 7410670 |
Process and apparatus for depositing single-component or multi-component layers and layer sequences using discontinuous injection of liquid and dissolved starting substances via a multi-channel injection unit |
Marcus Schumacher, Johannes Lindner, Marc Deschler |
2008-08-12 |
| 5911335 |
Liner choker |
— |
1999-06-15 |