Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6581612 | Chamber cleaning with fluorides of iodine | Peter Loewenhardt, Shamouil Shamouilian, Pavel Ionov | 2003-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6581612 | Chamber cleaning with fluorides of iodine | Peter Loewenhardt, Shamouil Shamouilian, Pavel Ionov | 2003-06-24 |