Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5225024 | Magnetically enhanced plasma reactor system for semiconductor processing | Peter R. Hanley, Stephen E. Savas, Karl B. Levy, Kevin G. Donohoe | 1993-07-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5225024 | Magnetically enhanced plasma reactor system for semiconductor processing | Peter R. Hanley, Stephen E. Savas, Karl B. Levy, Kevin G. Donohoe | 1993-07-06 |