Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292681 | Imprint method, imprint apparatus, and method of manufacturing article | — | 2025-05-06 |
| 12032283 | Imprint apparatus and method of manufacturing article | — | 2024-07-09 |
| 11681237 | Lithography apparatus and method of manufacturing article | — | 2023-06-20 |
| 11462404 | Imprint apparatus and method of manufacturing article | — | 2022-10-04 |
| 11137696 | Lithography apparatus and method of manufacturing article | — | 2021-10-05 |
| 9035248 | Drawing apparatus, and method of manufacturing article | — | 2015-05-19 |
| 7751029 | Load-lock apparatus, device manufacturing apparatus, and device manufacturing method | — | 2010-07-06 |
| 7321418 | Stage apparatus, exposure apparatus, and device manufacturing method | Yasuhito Sasaki, Yoshikazu Miyajima, Hideo Tanaka, Toshihiko Nishida | 2008-01-22 |
| 7307692 | Exposure apparatus and device manufacturing method | Nobushige Korenaga | 2007-12-11 |
| 6552308 | Substrate temperature adjustment apparatus for estimating a time taken until a substrate temperature falls within a target temperature range | — | 2003-04-22 |