| 6953939 |
Testing apparatus using scanning electron microscope |
Tetsuo Abe, Kouki Okawauchi, Tadashi Hattori, Hironori Fujita, Minoru Takeda +4 more |
2005-10-11 |
| 6831278 |
System and method for electron beam irradiation |
Masanobu Yamamoto, Hiroshi Kawase, Jun Sasaki, Minoru Takeda, Gakuo Komatsubara +2 more |
2004-12-14 |
| 6737660 |
Electron beam irradiation apparatus and electron beam irradiating method |
Yoshihisa Miura, Yuichi Aki, Hiroshi Kawase, Masanobu Yamamoto, Setsuo Norioka +2 more |
2004-05-18 |
| 6734437 |
System and method for electron beam irradiation |
Setsuo Norioka, Toshiaki Miyokawa, Jun Sasaki, Yuichi Aki, Yoshihisa Miura |
2004-05-11 |
| 6021295 |
Developing apparatus |
Eiji Ochiai, Shigeki Tsukahara, Makoto Hamaguchi |
2000-02-01 |
| 4439681 |
Charged particle beam scanning device |
Setsuo Norioka |
1984-03-27 |
| 4431915 |
Electron beam apparatus |
Seiichi Nakagawa, Yoshio Ishimori |
1984-02-14 |
