Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170997 | Atomic layer deposition and etch for reducing roughness | Xiang Zhou, Yoshie Kimura, Si Yi Li, Kazi Sultana, Radhika Mani +5 more | 2021-11-09 |
| 10658174 | Atomic layer deposition and etch for reducing roughness | Xiang Zhou, Yoshie Kimura, Si Yi Li, Kazi Sultana, Radhika Mani +5 more | 2020-05-19 |
| 9972502 | Systems and methods for performing in-situ deposition of sidewall image transfer spacers | Jae Ho Lee, Changwoo Lee, Phil Friddle, Stefan Schmitz, Michael Goss +1 more | 2018-05-15 |