| 12076760 |
Pre-wet module, deaerated liquid circulation system, and pre-wet method |
Masaya Seki, Nobuya YAMADA |
2024-09-03 |
| 11833551 |
Pre-wet module, deaerated liquid circulation system, and pre-wet method |
Masaya Seki, Nobuya YAMADA |
2023-12-05 |
| 10982347 |
Leak checking method, leak checking apparatus, electroplating method, and electroplating apparatus |
Shoichiro Ogata, Masaaki Kimura |
2021-04-20 |
| 10830834 |
Current measuring module using inspection substrate and inspection substrate |
Masaki Tomita, Hiroyuki Takenaka |
2020-11-10 |
| 10513795 |
Plating apparatus, plating method, and substrate holder |
Junko Mine, Tsutomu Nakada |
2019-12-24 |
| 10458036 |
Leak checking method, leak checking apparatus, electroplating method, and electroplating apparatus |
Shoichiro Ogata, Masaaki Kimura |
2019-10-29 |
| 10316425 |
Substrate holder, plating apparatus, and plating method |
Toshikazu Yajima, Masaaki Kimura |
2019-06-11 |
| 10316426 |
Plating apparatus, plating method, and substrate holder |
Junko Mine, Tsutomu Nakada |
2019-06-11 |
| 10240247 |
Anode holder and plating apparatus |
Masaaki Kimura, Junichiro Tsujino |
2019-03-26 |
| 10214830 |
Substrate holder and plating apparatus |
Masaaki Kimura, Yusuke Tamari |
2019-02-26 |
| 10106906 |
Plating apparatus |
Masaaki Kimura |
2018-10-23 |
| 9708724 |
Anode unit and plating apparatus having such anode unit |
Junichiro Tsujino, Tsutomu Nakada, Yusuke Tamari, Akira Owatari |
2017-07-18 |
| D758973 |
Electrical contact for use in a plating apparatus |
Jumpei Fujikata, Masaaki Kimura |
2016-06-14 |
| D742329 |
Electrical contact for use in a plating apparatus |
Jumpei Fujikata, Masaaki Kimura |
2015-11-03 |
| D725600 |
Electrical contact for use in a plating apparatus |
Jumpei Fujikata, Masaaki Kimura |
2015-03-31 |
| D719101 |
Electrical contact for use in a plating apparatus |
Masaaki Kimura, Toshikazu Yajima |
2014-12-09 |
| D717736 |
Electrical contact for use in a plating apparatus |
Masaaki Kimura, Toshikazu Yajima |
2014-11-18 |
| D706224 |
Electrical contact for use in a plating apparatus |
Masaaki Kimura, Toshikazu Yajima |
2014-06-03 |
| D705280 |
Sealing ring |
Masaaki Kimura, Jumpei Fujikata |
2014-05-20 |
| 7897024 |
Conducting belt for use with anode holder and anode holder |
Kenichi Abe, Yuji Araki, Yoshio Minami, Tomoyasu Nagayumi |
2011-03-01 |
| D556692 |
Electrical contact for use in a plating apparatus |
Kenichi Abe, Yuji Araki |
2007-12-04 |
| D555595 |
Electrical contact for use in a plating apparatus |
Kenichi Abe, Yuji Araki |
2007-11-20 |