Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12228499 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Jaehwang Jung, Yasuhiro Hidaka, Wookrae Kim, Jinseob Kim, Myungjun Lee | 2025-02-18 |
| 11761906 | Optical device | Yasuhiro Hidaka | 2023-09-19 |
| 11604136 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Jaehwang Jung, Yasuhiro Hidaka, Wookrae Kim, Jinseob Kim, Myungjun Lee | 2023-03-14 |
| 10429315 | Imaging apparatus and imaging method | Akio Ishikawa, Ken Ozawa, Kwang Soo Kim, Sean Park | 2019-10-01 |
| 9594240 | Lighting apparatus, and optical inspection apparatus and optical microscope using the lighting apparatus | Nobuyuki Kimura, Mitsuhiro Togashi, Masaki Takada | 2017-03-14 |
| 9453800 | Apparatus and method of inspecting a defect of an object | Akio Ishikawa, Mitsuhiro Togashi | 2016-09-27 |