MK

Michael Kuechel

ZY Zygo: 3 patents #24 of 99Top 25%
CG Carl Zeiss Smt Gmbh: 1 patents #657 of 1,189Top 60%
Overall (All Time): #996,007 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9234739 In situ calibration of interferometers Daniel Sýkora 2016-01-12
9103649 In situ calibration of interferometers Daniel Sýkora 2015-08-11
6876453 Metrology system for precision 3D motion Matthew J. Van Doren, Christopher J. Evans 2005-04-05
6816247 Moiré method and a system for measuring the distortion of an optical imaging system Joachim Heppner, Juergen Massig, Michael Arnz, Juergen Penzing, Uwe Schellhorn 2004-11-09
6804011 Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer 2004-10-12