Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7371285 | Motorized chamber lid | Michael Rosenstein, Alex Shenderovich, Marc Schweitzer, Ilya Lavitsky, Alvin Lau | 2008-05-13 |
| 7008517 | Shutter disk and blade for physical vapor deposition chamber | — | 2006-03-07 |
| 6827825 | Method for detecting the position of a shutter disk in a physical vapor deposition chamber | Allen Lau, Michael Rosenstein, Marc Schweitzer | 2004-12-07 |
| 6776848 | Motorized chamber lid | Michael Rosenstein, Alex Shenderovich, Marc Schweitzer, Ilya Lavitsky, Alvin Lau | 2004-08-17 |
| 6669829 | Shutter disk and blade alignment sensor | Allen Lau, Michael Rosenstein, Marc Schweitzer | 2003-12-30 |