Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6971832 | Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactor | Andrew Lunday | 2005-12-06 |
| 6935828 | Wafer load lock and magnetically coupled linear delivery system | Andrew Lunday | 2005-08-30 |
| 6246060 | Apparatus for holding and aligning a scanning electron microscope sample | Jeffry B. Bindell, Charles E. Bryson, III, Larry E. Plew, Catherine Vartuli, Xiao Z. Wu | 2001-06-12 |