Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10073361 | EUV lithography system and operating method | Dirk Heinrich Ehm, Stefan Schmidt, Edgar Osorio, Edwin Te Sligte, Hella Logtenberg | 2018-09-11 |
| 8436998 | Method of measuring focus of a lithographic projection apparatus | Gerardus Carolus Johannus Hofmans, Hubertus Antonius Geraets, Sven Gunnar Krister Magnusson | 2013-05-07 |
| 8289516 | Method of measuring focus of a lithographic projection apparatus | Gerardus Carolus Johannus Hofmans, Hubertus Antonius Geraets, Sven Gunnar Krister Magnusson | 2012-10-16 |