Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6760358 | Line-narrowing optics module having improved mechanical performance | Kay Zimmermann, Konstantin Aab, Matthias Kramer | 2004-07-06 |
| 6735225 | Chirp compensation method and apparatus | Hans-Stephan Albrecht, Matthias Kramer, Thomas Schroeder, Stefan Niedermeier | 2004-05-11 |
| 6700916 | E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems | Matthias Kramer, Gunter Nowinski, Juergen Kleinschmidt | 2004-03-02 |
| 6597462 | Laser wavelength and bandwidth monitor | Matthias Kramer | 2003-07-22 |
| 6563853 | Gas performance control system for gas discharge lasers | Peter Heist, Matthias Kramer, Juergen Kleinschmidt, Sergei V. Govorkov, Thomas Jünemann | 2003-05-13 |
| 6549555 | Gas performance control system for gas discharge lasers | Thomas Jünemann | 2003-04-15 |