Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911806 | Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium | Kunimasa Matsushita, Hiroshi Ishikawa | 2024-02-27 |
| 11817311 | Substrate cleaning method and substrate cleaning apparatus | Tomoatsu Ishibashi, Hiroshi Ishikawa | 2023-11-14 |
| 10157762 | Substrate processing apparatus and substrate presence or absence checking method and program | Tomohiro Tanaka, Kenichiro Saito, Koichi Takeda, Ryuichi Kosuge | 2018-12-18 |