Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7434589 | Wafer cleaning apparatus with anticipating malfunction of pump | Jung Min Kim, Seung-Kun Lee | 2008-10-14 |
| 7166183 | Apparatus and method for treating edge of substrate | Chang-Hyeon Nam, Seung-Kim Lee, Yoon-kyung Kim, Han-Yong Chae, Duk-Min Ahn | 2007-01-23 |
| 6742281 | Apparatus for drying semiconductor wafer using vapor dry method | Myung-Hwan Shin, Kyung-Seuk Hwang | 2004-06-01 |
| 5315601 | Error correction method and apparatus thereof | Hak-song Park, Young Cheol Kim, Tae-Yong Kim, Yong Jin Choi, Jae-moon Kim | 1994-05-24 |
| 5227992 | Operational method and apparatus over GF(2.sup.m) using a subfield GF(2.sup . | Jae Mun Kim, Hak-song Park, Hyeong-keun An, Heung-yeol Yeom | 1993-07-13 |