Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6904073 | High power deep ultraviolet laser with long life optics | Thomas A. Yager, William N. Partio, Richard L. Sandstrom, Xiaojiang Pan, John T. Melchior +11 more | 2005-06-07 |
| 6791098 | Multi-input, multi-output motion control for lithography system | Baruch Pletner, Richard Perkins | 2004-09-14 |
| 6704339 | Lithography laser with beam delivery and beam pointing control | David J. Warkentin, Palash P. Das, Brian Klene, R. Kyle Webb, Herve A. Besaucele +4 more | 2004-03-09 |
| 6563128 | Base stabilization system | David J. Warkentin, Baruch Pletner, John Allen Rule | 2003-05-13 |