| 5895917 |
Detector objective lens |
Toshimichi Iwai, Gerald Schonecker, Jürgen Frosien |
1999-04-20 |
| 5780859 |
Electrostatic-magnetic lens arrangement |
Hans-Peter Feuerbaum, Jürgen Frosien, Toshimichi Iwai, Gerald Schonecker |
1998-07-14 |
| 5640539 |
IC analysis system having charged particle beam apparatus for improved contrast image |
Akira Goishi, Masayuki Kurihara |
1997-06-17 |
| 5633595 |
IC analysis system and electron beam probe system and fault isolation method therefor |
Akira Goishi, Masayuki Kuribara |
1997-05-27 |
| 5592099 |
IC tester joined with ion beam tester and the detection method of the failure part of IC |
Masayuki Kuribara, Akira Goishi |
1997-01-07 |
| 5589780 |
IC Analysis system and electron beam probe system and fault isolation method therefor |
Akira Goishi, Masayuki Kuribara |
1996-12-31 |
| 5528156 |
IC analysis system and electron beam probe system and fault isolation method therefor |
Akira Goishi, Masayuki Kuribara |
1996-06-18 |