| 6521024 |
Seal plate and pressure adjusting mechanism for the seal plate |
Masami Akahori, Jo Matsune, Zituhiko Hayashi, Koichi Yokose, Yuichi Kuroki |
2003-02-18 |
| 5418643 |
Mirror assembly for use in automobile having water drops removing apparatus |
Morihiko Ogasawara |
1995-05-23 |
| 5381411 |
Apparatus for controlling ATM cell generation rate |
Tetsuo Tachibana |
1995-01-10 |
| 4965630 |
Projection exposure apparatus |
Kinya Kato, Kazuo Ushida, Toshiyuki Namikawa, Koichi Matsumoto, Kyoichi Suwa |
1990-10-23 |
| 4871237 |
Method and apparatus for adjusting imaging performance of projection optical apparatus |
Satoru Anzai |
1989-10-03 |
| 4803524 |
Method of and apparatus for detecting the accuracy of superposition exposure in an exposure apparatus |
Kenji Higashi, Hiroki Tateno |
1989-02-07 |
| 4676614 |
Apparatus for regulating the optical characteristics of a projection optical system |
— |
1987-06-30 |
