Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7426024 | System for inspecting a disk-shaped object | Ren Schenck | 2008-09-16 |
| 7028565 | Method and arrangement for transporting and inspecting semiconductor substrates | Andreas Birkner, Frank Bernhardt | 2006-04-18 |
| 6962471 | Substrate conveying module and system made up of substrate conveying module and workstation | Andreas Birkner, Karsten Urban, Joachim Wienecke | 2005-11-08 |
| 6845174 | Arrangement and method for the identification of substrates | Dominik Grau, Andreas Birkner, Frank Bernhardt | 2005-01-18 |
| 6789436 | Method and arrangement for transporting and inspecting semiconductor substrates | Andreas Birkner, Frank Bernhardt | 2004-09-14 |
| 6553850 | Method and arrangement for transporting and inspecting semiconductor substrates | Andreas Birkner, Frank Bernhardt | 2003-04-29 |